XeF2, XeF4 and XeF6 are obtained through direct chemical reactions occurring between Xe and F2. The product of the chemical reaction depends upon the conditions of the reaction:
When Xe reacts with F2 under the condition of 673K temperature and 1 bar pressure, XeF2 is produced.
When Xe reacts with F2 in the ratio of 1:5 under the condition of 873K temperature and 7 bar pressures, XeF4 is produced.
When Xe reacts with F2 in the ratio of 1:20 under the condition of 573K temperature and 60-70 bar pressures, XeF6 is produced.